SOI FinFET simulator using non-equilibrium Green's functions
3D analysis tool for SOI FinFET
An overview of the simulation flow for SOI FinFETs and the tools used therein is provided. An example of 3D process simulation using the process simulator CSupre is introduced. Based on the structural data created from the process simulation, the features of FinFET modeling in the device simulator APSYS, including quantum confinement, oxide layer dissolution, and quantum ballistic current transport models, along with analysis examples, are presented.
- 企業：クロスライトソフトウェアインク日本支社
- 価格：Other
